Gas Flow Control Employing Temperature and Pressure Compensation

[+] Author and Article Information
Seth R. Goldstein, Andrew C. Harvey

Foster-Miller Associates, Inc., Waltham, Mass.

J. Dyn. Sys., Meas., Control 93(3), 200-205 (Sep 01, 1971) (6 pages) doi:10.1115/1.3426497 History: Received July 23, 1970; Online July 13, 2010


Two passive gas flow controllers are presented which provide compensation for variations in ambient temperature and supply pressure. One technique, which provides first-order error compensation, utilizes a choked orifice having its area linearily varied in proportion to a diaphragm deflection. Compensation is achieved by applying upstream pressure to one side of the diaphragm, and by applying a trapped gas pressure proportional to absolute temperature on the other side of the diaphragm. General design relationships are presented, and a prototype unit constructed to control a minute flow rate of high-pressure oxygen is described. A second flow control technique is presented which provides the required nonlinear temperature compensation for flow supplied through a constant-area choked orifice. This is achieved by utilizing a compliant volume of trapped gas to generate a pressure proportional to the square root of absolute temperature. This pressure is used to control the pressure upstream of the choked orifice, thus providing constant flow.

Copyright © 1971 by ASME
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