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RESEARCH PAPERS

Modeling and Dynamic Characterization of the Czochralski Crystal Growth Process

[+] Author and Article Information
M. A. Gevelber

Manufacturing Engineering Department, College of Engineering, Boston University, Boston, MA 02215

G. Stephanopoulos

Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139

J. Dyn. Sys., Meas., Control 115(1), 109-114 (Mar 01, 1993) (6 pages) doi:10.1115/1.2897384 History: Received February 24, 1989; Revised August 26, 1991; Online March 17, 2008

Abstract

A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.

Copyright © 1993 by The American Society of Mechanical Engineers
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