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RESEARCH PAPERS

Control and System Design for the Czochralski Crystal Growth Process

[+] Author and Article Information
M. A. Gevelber

Department of Manufacturing Engineering, Boston University, Boston, MA 02215

G. Stephanopoulos

Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139

J. Dyn. Sys., Meas., Control 115(1), 115-121 (Mar 01, 1993) (7 pages) doi:10.1115/1.2897385 History: Received February 24, 1989; Revised April 01, 1992; Online March 17, 2008

Abstract

An expanded set of control objectives is proposed for the Czochralski crystal growth process. Consideration of the thermal stress near the interface yields an operating regime specification in terms of interface shape. A lumped parameter model is used to determine the performance of alternate inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle. The performance of alternative control structures are evaluated.

Copyright © 1993 by The American Society of Mechanical Engineers
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