Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams

[+] Author and Article Information
P. Ruther, W. Bacher, K. Feit, D. Maas

Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, P.O. Box 3640, D-76024 Karlsruhe, Germany

W. Menz

Institut für Mikrosystemtechnik, Universität Freiburg, Universitätsgelände, Flugplatz D-79085 Freiburg, Germany

J. Dyn. Sys., Meas., Control 119(1), 57-60 (Mar 01, 1997) (4 pages) doi:10.1115/1.2801214 History: Received September 06, 1995; Online December 03, 2007


A microtesting system manufactured by the LIGA process (Becker et al, 1986) combined with a new sacrificial structure technique is presented. The system is used for bending experiments to determine the Young’s modulus of electroplated materials used in the LIGA process. The force needed to bend the specimen is generated by a pneumatically driven microactuator. This actuator is able to produce forces in the range of several 10 mN and displacements of 50 μm and more. Bending of the specimen is detected optically. With a trap for adhesive, adhesive bonding can be applied to cover the actuator chamber with a glass platelet. For the fluidic supply of the actuator, hoses are bonded into microtunnels (140 μm diameter) running parallel to the substrate and passing through the sidewalls of the actuator housing. The microtunnels are produced by the sacrificial structure technique.

Copyright © 1997 by The American Society of Mechanical Engineers
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