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TECHNICAL PAPERS

Error Analysis of the Cylindrical Capacitive Sensor for Active Magnetic Bearing Spindles

[+] Author and Article Information
Hyeong-Joon Ahn, Soo Jeon, Dong-Chul Han

School of Mechanical & Aerospace Engineering, Seoul National University, Kwanak-ku, Shilim-dong San 56-1, Seoul, 151-742, Korea

J. Dyn. Sys., Meas., Control 122(1), 102-107 (Jan 06, 1999) (6 pages) doi:10.1115/1.482433 History: Received January 06, 1999
Copyright © 2000 by ASME
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References

Chapman,  P. D., 1985, “A Capacitive based Ultraprecision Spindle Error Analyser,” J. Prec. Eng., 7, No. 3, July, pp. 129–137.
Salazar,  A. O., Dunford,  W., Stephan,  R., and Watanabe,  E., 1990, “A Magnetic Bearing System Using Capacitive Sensors for Position Measurement,” IEEE Trans. Magn., 26, No. 5, pp. 2541–2543.
Chang I. B., 1994, “A Study on the Performance Improvement of a Magnetic Bearing System Using Built-in Capacitive Type Transducers,” Ph.D. thesis, Seoul National University, Korea.
Chung, S. C., 1996, “A Study on the Dynamic Characteristics and Control Performance Improvements of an Active Magnetic Bearing System for the High Speed Spindle,” Ph.D. thesis, Seoul National University, Korea.
Mitsui, K., 1982, “Development of a New Measuring Method for Spindle Rotation Accuracy by Three-Points Method,” Proceedings of the 23rd International MTDR, pp. 115–121.
Gao,  W., Kiyono,  S., and Sugawara,  T., 1997, “Roundness Measurement by New Error Separation Method,” J. Prec. Eng., 21, pp. 123–132.
Jay,  F. Tu,  Bernd,  Bossmanns, and Spring,  C. C. Hung, 1997, “Modeling and Error Analysis for Assessing Spindle Radial Error Motions,” J. Prec. Eng.,21, pp. 90–101.
Hammond,  J. L., and Glidewell,  S. R., 1983, “Design of Algorithms to Extract Data from Capacitance Sensors to Measure Fastener Hole Profiles,” IEEE Trans Instrum. Meas., 32, pp. 343–349.
Ahn, H. J., Lee, S. H., and Han, D. C., 1999, “Precision AMB Spindles with Cylindrical Capacitive Sensors,” Proceedings of 10th World Congress on TMM(IFToMM), 5 , pp. 2043–2048, Oulu, Finland, June 20–24.

Figures

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Probe type sensor and CCS: (a) using four probe sensor; (b) using the CCS
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Variables for rotor position
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Capacitance at the concentric rotor position
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Capacitance at the eccentric rotor position
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The effect of the sensor size ζ on the error amplification factor em/hm with various odd harmonic numbers of m
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Measurement errors of two probe sensors, four probe sensors, and the CCS (dia. of rotor 50 mm gap between sensor and rotor 0.5 mm magnitude of roundness error 0.001 mm radius of revolution 0.003 mm)
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Test rotors with harmonic roundness errors: (a) rotor 1; (b) rotor 2
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Magnitudes of harmonic errors of each testing rotor
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Experimental setup: (a) schematics; (b) sensor housing
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Simulation of measuring orbits of test rotors with various sensor types (dia. of test rotor 50 mm depth of harmonic error 0.05 mm, radii of revolution 0.02 mm, and 0.03 mm). (a) Rotor 1 with third harmonic error; (b) rotor 2 with fourth harmonic error.
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Experiments of measuring orbits of test rotors with various sensor types (dia. of test rotor 50 mm, depth of harmonic error 0.05 mm, radii of revolution 0.02 mm and 0.03 mm). (a) Rotor 1 with third harmonic error; (b) rotor 2 with fourth harmonic error.
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Mounting errors of the CCS: (a) misalignment; (b) angle error
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Mounting errors of probe sensor

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