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TECHNICAL PAPERS

System Identification of a MEMS Gyroscope

[+] Author and Article Information
Robert T. M’Closkey, Steve Gibson, Jason Hui

Mechanical and Aerospace Engineering Department University of California Los Angeles, CA 90095-1597

J. Dyn. Sys., Meas., Control 123(2), 201-210 (Jun 10, 1999) (10 pages) doi:10.1115/1.1369360 History: Received June 10, 1999
Copyright © 2001 by ASME
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References

Tang, T. K., Gutierrez, R. C., Wilcox, J. Z., Stell, C., Voperian, V., Calvet, R., Li, W., Charkaborty, I., Bartman, R., and Kaiser, W. J., 1996, “Silicon Bulk Micromachined Vibratory Gyroscope,” Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 288-293.
Yazdi,  N., Ayazi,  F., and Najafi,  K., 1998, “Micromachined Inertial Sensors,” Proc. IEEE, 86, No. 8, pp. 1640–1659.
Zhbanov,  Yu. K., and Zhuravlev,  V. F., 1998, “On the Balancing of a Hemispherical Resonator Gyro,” Mech. Solids, 33, No. 4, pp. 2–13.
Newton,  G. C., 1963, “Theory and Practice in Vibratory Rate Gyros,” Control. Eng., 10, No. 6, pp. 95–99.
Morrow,  C. T., 1955, “Zero Signals in the Sperry Tuning Fork Gyrotron,” J. Acoust. Soc. Am., 27, No. 3, pp. 581–585.
Lynch, D. D., 1995, “Vibratory Gyro Analysis by the Method of Averaging,” The 2nd Saint Petersburg International Conference on Gyroscopic Technology and Navigation, Scientific Council of the Russian Academy of Sciences on the Traffic Control and Navigation Problems, Part I, pp. 26–34.
Lynch, D. D., 1998, “Coriolis Vibratory Gyros,” Proceedings, Symposium Gyro Technology, Stuttgart, Vol. 1, pp. 1–14.
M’Closkey, R. T., Vakakis, A. F., and Gutierrez, R., 2001, “Mode Localization Induced by a Nonlinear Control Loop,” Nonlinear Dyn., (to appear).
Tang, T. K., Gutierrez, R. C., Wilcox, J. Z., Stell, C., Vorperian, V., Dickerson, M., Goldstein, B., Savino, J. L., Li, W. J., and Calvet, R., 1996, “Silicon Bulk Micromachined Vibratory Gyroscope for Microspacecraft.” Proceedings, The International Society for Optical Engineering (SPIE), Denver, CO., Vol. 2810, pp. 101–115.
Tang, T. K., Gutierrez, R. C., Stell, C. B., Vorperian, V., Arakaki, G. A., Rice, J. T., Li, W. J., Chakraborty, I., Shcheglov, K., Wilcox, J. Z., and Kaiser, W. J., 1997, “A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft,” Proceedings IEEE, The Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 500–505.
Lawrence, A., 1998, Modern Inertial Technology: Navigation, Guidance, and Control, Springer-Verlag, New York.
Jiang,  S.-B., and Gibson,  J. S., 1995, “An Unwindowed Multichannel Lattice Filter With Orthogonal Channels,” IEEE Trans. Signal Process., 43, No. 12, pp. 2831–2842.
Jiang, S.-B., Gibson, J. S., and Hollkamp, J. J., 1992, “Identification of a Flexible Structure by a New Multichannel Lattice Filter,” Proc. of 1992 American Control Conference, pp. 1681–1685.
Green, M., and Limebeer, D., 1995, Linear Robust Control, Prentice-Hall, NJ.
Zhou, K., Doyle, J., and Glover, K., 1996, Robust and Optimal Control, Prentice Hall, NJ.

Figures

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JPL microgyro with sense and actuator electrodes labeled (picture courtesy of T. Tang, JPL)
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Top view of cloverleaf structure with principal axes of stiffness matrix (x1−x2 frame) at orientation angle θ with respect to the measurement/actuation coordinates (x−y frame)
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Sense and drive axis control loops
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Output sequences and power spectral densities (in dB)
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Identified 40th-order MIMO model
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Comparison of 40th-order model (solid) and six state balanced truncation (dash)

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