System Identification of a MEMS Gyroscope

[+] Author and Article Information
Robert T. M’Closkey, Steve Gibson, Jason Hui

Mechanical and Aerospace Engineering Department University of California Los Angeles, CA 90095-1597

J. Dyn. Sys., Meas., Control 123(2), 201-210 (Jun 10, 1999) (10 pages) doi:10.1115/1.1369360 History: Received June 10, 1999
Copyright © 2001 by ASME
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JPL microgyro with sense and actuator electrodes labeled (picture courtesy of T. Tang, JPL)
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Top view of cloverleaf structure with principal axes of stiffness matrix (x1−x2 frame) at orientation angle θ with respect to the measurement/actuation coordinates (x−y frame)
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Sense and drive axis control loops
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Output sequences and power spectral densities (in dB)
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Identified 40th-order MIMO model
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Comparison of 40th-order model (solid) and six state balanced truncation (dash)




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