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TECHNICAL PAPERS

Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing

[+] Author and Article Information
X. Sun, R. Horowitz, K. Komvopoulos

Department of Mechanical Engineering, University of California, Berkeley, CA 94720

J. Dyn. Sys., Meas., Control 124(4), 599-605 (Dec 16, 2002) (7 pages) doi:10.1115/1.1514658 History: Received August 01, 2001; Revised March 01, 2002; Online December 16, 2002
Copyright © 2002 by ASME
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References

Figures

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Scanning electron microscopy image of a polycrystalline silicon MEMS resonator used for fatigue testing.
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Block diagram of a phase-locked loop.
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Block diagram of the natural frequency tracking system for a MEMS resonator.
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The excitation frequency tracks the natural frequency when KI=20<23.4=KI0.
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The excitation frequency tracks the natural frequency when KI=10<23.4=KI0.
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The excitation frequency oscillates about the natural frequency when KI=25>23.4=KI0.
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The excitation frequency tracks the decay of the resonator natural frequency (KI=10).
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The response of the excitation frequency for a cubic nonlinear resonator with 1% cubic force (KI=0.1):a) Overall response, and b) detail at steady state.
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The response of the excitation frequency for a cubic nonlinear resonator with 5% cubic force (KI=0.1).
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The excitation frequency tracks the natural frequency under the presence of Brownian and capacitive position sensing noise (KI=20).

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