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TECHNICAL PAPERS

A Fresh Insight Into the Microcantilever-Sample Interaction Problem in Non-Contact Atomic Force Microscopy

[+] Author and Article Information
Nader Jalili, Mohsen Dadfarnia

Smart Structures and NEMS Laboratory, Department of Mechanical Engineering, Clemson University, Clemson, SC 29634

Darren M. Dawson

Robotics and Mechatronics Laboratory, Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634

J. Dyn. Sys., Meas., Control 126(2), 327-335 (Aug 05, 2004) (9 pages) doi:10.1115/1.1767852 History: Received May 13, 2003; Revised October 23, 2003; Online August 05, 2004
Copyright © 2004 by ASME
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References

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Figures

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(Left) Schematic depicting basic AFM operation and sub-components, and (right) real scale drawing
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Schematic diagram of non-contact AFM operation
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Lumped-parameters model of the AFM system
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Schematic of distributed-parameters model of the AFM system
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Schematic diagram of the proposed shear force measurement module utilizing piezoelectric film sensors
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Simulation results for the AFM base motion for distributed-parameters model
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Simulation results for the AFM tip displacement for distributed-parameters model
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The interaction force identification (in [N]) for distributed-parameters model; (a) the left hand side of (21), (b) the left hand side of (40) and (c) the difference between (a) and (b)
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The interaction force identification (in [N]); (a) lumped-parameters model, (b) the left hand side of (21), and (c) the difference between (a) and (b)
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Comparison between the shear force value and the other terms in interaction force Eq. (40)
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Simulation results for actual and estimated normalized interaction forces
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Simulation results for actual and estimated normalized distance between AFM tip and sample surface

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