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Article

New Adaptive Mode of Operation for MEMS Gyroscopes

[+] Author and Article Information
Sungsu Park

Department of Aerospace Engineering, Sejong University, Kwangjin-gu, Gunja-dong 98, Seoul, Koreae-mail: sungsu@sejong.ac.kr

Roberto Horowitz

Department of Mechanical Engineering, University of California, Berkeley, Berkeley, CA 94720e-mail: horowitz@me.berkeley.edu

J. Dyn. Sys., Meas., Control 126(4), 800-810 (Mar 11, 2005) (11 pages) doi:10.1115/1.1849252 History: Received April 25, 2002; Revised September 27, 2003; Online March 11, 2005
Copyright © 2004 by ASME
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References

Yazdi,  N., Ayazi,  F., and Najafi,  K., 1998, “Micromachined Inertial Sensors,” Proc. IEEE, 86(8), pp. 1640–1659.
Shkel, A., Howe, R. T., and Horowitz, R., 1999, “Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfection,” Int. Conf. On Modelling and Simulation of Microsystems, Puerto Rico, USA, pp. 605–608.
Lawrence, A., 1993, Modern Inertial Technology: Navigation, Guidance and Control, Springer Verlag, New York.
Clark, W. A., 1997, Micromachined Vibratory Rate Gyroscopes, Ph.D. thesis, U.C. Berkeley.
Juneau, T. N., 1997, Micromachined Dual Input Axis Rate Gyroscope, Ph.D. thesis, U.C. Berkeley.
Loveday,  P. W., and Rogers,  C. A., 1998, “Modification of Piezoelectric Vibratory Gyroscope Resonator Parameters by Feedback Control,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 45(5), pp. 1211–1215.
Ljung, P. B., 1997, Micromachined Gyroscope With Integrated Electronics, Ph.D. thesis, U.C. Berkeley.
Jiang, X., Seeger, J., Kraft, M., and Boser, B. E., 2000, “A Monolithic Surface Micromachined Z-Axis Gyroscope With Digital Output,” 2000 Symposium on VLSI Circuits, Honolulu, HI, USA, pp. 16–19.
Shkel, A. M., Horowitz, R., Seshia, A., Park, S., and Howe, R. T., 1999, “Dynamics and Control of Micromachined Gyroscopes,” Proceedings of the American Control Conference, pp. 2119–2124.
Park, S., 2000, Adaptive Control Strategies for MEMS Gyroscopes, Ph.D. thesis, U.C. Berkeley.
Boser, B. E., 1997, “Electronics for Micromachined Inertial Sensors,” International Conference on Solid-State Sensors and Actuators, pp. 1169–1172.
Chen, C.-T., 1984, Linear System Theory and Design, CBS College Publishing, New York, NY.
Sastry, S. S., 1989, Adaptive Control: Stability, Convergence and Robustness, Prentice–Hall, Englewood Cliffs, NJ.
Park, S., and Horowitz, R., 2000, “Adaptive Control of MEMS Gyroscopes,” The 7th Mechatronics Forum International Conference, Atlanta, GA, USA.

Figures

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A model of a MEMS z axis gyroscope
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Stability bounds with respect to observer gain L: (a) γ=I,ω1=1,ω2=0.5, (b) γ=I,ω1=1,ω2=1, (c) γ=I,ω1=1,ω2=1.5, (d) γ=I,ω1=1,ω2=2, (e) γ=0.5I,ω1=1,ω2=1.5, and (f) is the same as (c)
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Convergence rate comparisons between analytical equation and various ratios of resonant frequencies
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Convergence rate comparisons between analytical equation and various control gains
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Convergence rate comparisons between analytical equation and various observer gains
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Variance variations of angular rate estimate error Ω̃z due to (a) angular rate adaptation gain γΩ, (b) control gains γ1,2, (c) spring coefficient adaptation gain γR, and (d) damping coefficient adaptation
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Comparison between a conventional and an adaptive mode
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Parameter estimation errors: (a) damping coefficients and (b) spring coefficients
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Time responses of angular rate estimate to the 5°/s step input
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Time responses of angular rate estimate to the 5°/s sinusoid input at 50 Hz

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