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TECHNICAL PAPERS

Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback

[+] Author and Article Information
D. H. Maithripala

Department of Mechanical Engineering,  Texas Tech University, Lubbock, TX 79409sanjeeva.maithripala@ttu.edu

Jordan M. Berg

Department of Mechanical Engineering,  Texas Tech University, Lubbock, TX 79409jordan.berg@ttu.edu

W. P. Dayawansa

Department of Mathematics and Statistics,  Texas Tech University, Lubbock, TX 79409wdayawan@ttu.edu

J. Dyn. Sys., Meas., Control 127(3), 443-450 (Aug 17, 2004) (8 pages) doi:10.1115/1.1985443 History: Received February 13, 2004; Revised July 20, 2004; Accepted August 17, 2004

This paper examines control strategies for electrostatically actuated microelectromechanical systems (MEMS), with the goals of using feasible measurements to eliminate the pull-in bifurcation, robustly stabilize any desired operating point in the capacitive gap, decrease settling time, and reduce overshoot. We show that input-output linearization, passivity-based design, and the theory of port-controlled Hamiltonian systems lead naturally to static output feedback of device charge. This formalizes and extends previously reported results from the MEMS literature. Further analysis suggests that significantly improving transient behavior in lightly damped MEMS requires dynamic estimation of electrode velocity. We implement output-feedback control using a reduced-order nonlinear observer. Simulations predict greatly improved transient behavior, and large reductions in control voltage.

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Copyright © 2005 by American Society of Mechanical Engineers
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Figures

Grahic Jump Location
Figure 1

1D model of a electrostatic microactuator. Top plate of the MEMS is free to move and the bottom plate is held fixed.

Grahic Jump Location
Figure 2

Stabilizing a gap of 20% of the zero voltage gap. The system starts at equilibrium point (0 1 0). Solid curve: linear feedback 15, solid-dotted curve: passivity-based control 16, dashed curve: linear charge feedback 21, dotted curve: charge feedback with input-output linearized system 14.

Grahic Jump Location
Figure 3

The control voltage u(t). The solid line at u=3.4 corresponds to the series voltage source required by the series capacitor method. Solid curve: linear feedback 15, solid-dotted curve: passivity-based control 16, dashed curve: linear charge feedback 21, dotted curve: charge feedback with input-output linearized system 14.

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