Modal Simulation and Testing of a Micro-Manipulator

[+] Author and Article Information
Yongjun Lai, Marek Kujath, Ted Hubbard

Mechanical Engineering Department,  Dalhousie University, Halifax, Nova Scotia, B3J 2X4, Canada

J. Dyn. Sys., Meas., Control 127(3), 515-519 (Nov 07, 2004) (5 pages) doi:10.1115/1.1978907 History: Received May 29, 2003; Revised November 07, 2004

A micro-machined manipulator with three kinematic degrees-of-freedom (DOF): x, y, and φ is presented. The manipulator is driven by three thermal actuators. A six DOF discrete spring-mass model of the compliant mechanism is developed which manifests the dynamic properties of the device. Numerical simulations are compared with experimental results.

Copyright © 2005 by American Society of Mechanical Engineers
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Figure 1

The layout of the micro manipulator showing three actuators and the central platform

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Figure 2

Structure of the S-joint and its model

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Figure 3

Delta Thermal Actuator: (a) Mass Center location, (b) Kinematic models of flexures

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Figure 4

A 6-elastic-DOF Model of the Manipulator

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Figure 5

Different combinations of driving motors

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Figure 6

Frequency response spectrum generated by a-drive (Fig. 5)

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Figure 7

Frequency response spectrum excited by bc-drive (Fig. 5)

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Figure 8

Frequency response spectrum excited by abc-drive (Fig. 5)



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