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TECHNICAL PAPERS

High Precision Hydrostatic Actuation Systems for Micro- and Nanomanipulation of Heavy Loads

[+] Author and Article Information
Saeid Habibi, Richard Burton, Eric Sampson

 University of Saskatchewan, Department of Mechanical Engineering, Saskatoon, Saskatchewan, S7N 5A9, Canada

J. Dyn. Sys., Meas., Control 128(4), 778-787 (Sep 22, 2005) (10 pages) doi:10.1115/1.2229259 History: Received November 09, 2004; Revised September 22, 2005

In this paper reports on an important finding, that is, hydrostatic actuation systems are able to manipulate heavy loads with submicron precision and a large stroke. In this relation, the design of a high-precision hydrostatic actuation system referred to as the ElectroHydraulic Actuator (EHA) is presented. A laboratory prototype of this system has achieved an unprecedented level of performance by being able to move a large load of 20Kg with a precision of 100nm and a stroke of 12cm. This level of performance places the hydrostatic actuation concept in competition with piezoelectric platforms in terms of positional accuracy. Experimental results from this prototype are reported and analyzed.

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Copyright © 2006 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

Common hydrostatic circuits (4). (a) Using a symmetrical rotary actuator; (b) using an asymmetrical linear actuator

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Figure 2

The EHA circuit diagram (1)

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Figure 3

Dead band in hydrostatic actuation (13)

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Figure 4

Linear symmetrical actuator (3)

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Figure 5

Control block diagram

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Figure 6

Control block diagram

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Figure 7

Linearized EHA model block diagram

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Figure 8

The EHA Prototype

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Figure 9

The step response of the EHA prototype. (a) Coarse motion—position; (b) submicron range—position error; (c) expanded submicron range—position error

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Figure 10

ETFE Gain and phase plots for the input amplitude of 1V(4). (a) Estimated gain plot; (b) estimated phase plot.

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