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TECHNICAL PAPERS

Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties

[+] Author and Article Information
Guchuan Zhu

 Department of Electrical Engineering, École Polytechnique de Montréal, C.R. 6079, Station Centre-ville, Montréal, Quebec H3C 3A7, Canadaguchuan.zhu@polymtl.ca

Julien Penet

 Department of Electrical Engineering, École Polytechnique de Montréal, C.R. 6079, Station Centre-ville, Montréal, Quebec H3C 3A7, Canadajulien.penet@polymtl.ca

Lahcen Saydy

 Department of Electrical Engineering, École Polytechnique de Montréal, C.R. 6079, Station Centre-ville, Montréal, Quebec H3C 3A7, Canadalahcen.saydy@polymtl.ca

J. Dyn. Sys., Meas., Control 129(6), 786-794 (Feb 05, 2007) (9 pages) doi:10.1115/1.2789469 History: Received February 09, 2006; Revised February 05, 2007

Due to the compact layout, manufacturing tolerance, modeling errors, and environmental changes, microelectromechanical systems (MEMSs) are subjected to parasitics and parameter variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic microactuator in the presence of uncertainties. The dynamical model of the system, including parallel and serial parasitics, is firstly established and two control schemes, both based on input-to-state stabilization and robust backstepping, are proposed. The stability and the performance of the system using these control schemes are demonstrated through both stability analysis and numerical simulation.

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Copyright © 2007 by American Society of Mechanical Engineers
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Figures

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Figure 1

1DOF parallel-plate electrostatic actuator

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Figure 2

Equivalent circuit of 1DOF parallel-plate electrostatic actuator with parallel and serial parasitic capacitances

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Figure 3

Influence of serial parasitics to static behavior of parallel-plate devices

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Figure 4

Influence of parasitics. (a) ISS-CLF controller: (a-1) variation of serial parasitics ρs; (a-2) variation of parallel parasitics ρp. (b) Cased ISS controller: (b-1) variation of serial parasitics ρs; (b-2) variation of parallel parasitics ρp.

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Figure 5

Robustness against parametric uncertainties. (a) ISS-CLF controller: (a-1) variation of damping coefficient ζ; (a-2) variation of loop resistance r. (b) Cased ISS controller: (b-1) variation of damping coefficient ζ; (b-2) variation of loop resistance r.

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Figure 6

System stability at the contact point. (a) ISS-CLF controller: (a-1) deflection; (a-2) control signal. (b) Cased ISS controller: (b-1) deflection; (b-2) control signal.

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