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Technical Briefs

Lyapunov-Based Stabilization of MEMS Relays

[+] Author and Article Information
Y. Bastani

Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803-6413ybasta2@lsu.edu

M. S. de Queiroz

Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803-6413dequeiroz@me.lsu.edu

J. Dyn. Sys., Meas., Control 131(1), 014503 (Dec 05, 2008) (9 pages) doi:10.1115/1.3023134 History: Received January 09, 2007; Revised August 20, 2008; Published December 05, 2008

In this paper, nonlinear stabilizers are introduced for voltage-controlled microelectromechanical system (MEMS) relays. The control constructions follow a Lyapunov approach and are based on a nonlinear dynamic model applicable to the two types of MEMS relays—electrostatic and electromagnetic. Two control schemes are presented with the objectives of avoiding pull-in during the microrelay closing and improving the transient response during the microrelay opening. First, an adaptive state feedback stabilizer is proposed to compensate for parametric uncertainty in all mechanical parameters and selected electrical parameters while ensuring asymptotic regulation of the electrode opening and closing. Next, a model-based observer/stabilizer is proposed to account for the lack of velocity measurements. Simulations demonstrate the performance of the two control schemes in comparison to the typical open-loop operation of the MEMS relay.

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Copyright © 2009 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

Schematic of MEMS relays

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Figure 2

Picture of an electromagnetic microrelay (1) (used with permission of Professor Wanjun Wang)

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Figure 3

Open-loop operation of MEMS relay: gap and control voltage

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Figure 4

Open-loop operation of MEMS relay: velocity and electrical state

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Figure 5

Adaptive controller: gap and control voltage

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Figure 6

Adaptive controller: velocity and electrical state

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Figure 7

Adaptive controller: sample of parameter estimates

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Figure 8

Observer-based controller: gap and control voltage

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Figure 9

Observer-based controller: velocity and electrical state

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