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Research Papers

Design and Testing of a Nanometer Positioning System

[+] Author and Article Information
Lu Lihua1

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, P.R. Chinalihual@hit.edu.cn

Liang Yingchun

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, P.R. Chinaycliang@hit.edu.cn

Guo Yongfeng

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, P.R. Chinayfguo@hit.edu.cn

Shimokohbe Akira

Precision and Intelligence Laboratory, Tokyo Institute of Technology, Kanagawa 226-8503, Japanshimo@pi.titech.ac.jp

1

Corresponding author.

J. Dyn. Sys., Meas., Control 132(2), 021011 (Feb 09, 2010) (6 pages) doi:10.1115/1.4000811 History: Received May 23, 2008; Revised November 24, 2009; Published February 09, 2010; Online February 09, 2010

This paper presents the design and implementation of a positioning system with a dc servomotor and ball-screw mechanism used to realize high-precision positioning over a wide travel range with nanometer level positioning error and near zero overshoot. Instead of the popular dual-model control strategy and friction compensation, a high-gain proportional-integral-derivative controller is used to realize a single-step point-to-point positioning. The controller parameters are obtained by placing closed-loop poles according to the macrodynamics of a ball-screw mechanism only to avoid identification of microdynamics and friction modeling. In order to suppress the overshoot caused by actuator saturation in long-stroke positioning, a trajectory planning method is applied to calculate the input of the closed-loop system. Experimental and simulation results demonstrate that single-step precision positioning responses to different size commands are achieved without producing any large overshoot. In point-to-point positioning from 100 mm down to 10 nm, the positioning error is within 2 nm and the response dynamics is satisfactory.

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Copyright © 2010 by American Society of Mechanical Engineers
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Figures

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Figure 1

Configuration of ball-screw-drive table system

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Figure 2

Ball-screw-drive positioning system

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Figure 3

Table displacement versus motor torque with u=0.05t V

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Figure 4

Dynamic model of drive mechanism

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Figure 5

Block diagram of positioning system

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Figure 6

Measurement noise

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Figure 7

Simulation responses of closed-loop system to 10 mm step input: (a) without antiwindup scheme and (b) with antiwindup scheme

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Figure 8

Simulation of 10 mm positioning response

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Figure 9

Experimental responses: (a) 100 mm positioning response, (b) zoomed view of (a), (c) steady-state error of 100 mm positioning response, (d) 10 mm positioning response, (e) zoomed view of (d), (f) steady-state error of 10 mm positioning response, (g) 1.0 mm positioning response, (h) zoomed view of (g), and (i) steady-state error of 1.0 mm positioning response

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