Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

[+] Author and Article Information
D. Croft

Department of Mechanical Engineering, 50 S. Central Campus Dr., MEB 3201, University of Utah, Salt Lake City, UT 84112-9208

G. Shed

Burleigh Instruments Inc., Fishers, NY 14453

S. Devasia

Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600

J. Dyn. Sys., Meas., Control 123(1), 35-43 (Nov 19, 1999) (9 pages) doi:10.1115/1.1341197 History: Received November 19, 1999
Copyright © 2001 by ASME
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x-y-z axes of tube-shaped piezoactuator used in scanning probe microscopy
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Schematics of experimental AFM system
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Inversion-based approach for x-axis scan control
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Viscoelastic creep model
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Bode plots (solid line is measured and dashed line is model)
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Comparison of measured and predicted creep response
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Preisach inverse-hysteresis model
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Experimental verification of inverse-hysteresis model: The predicted input (solid line) from the inverse-hysteresis model is compared with the actual input (dotted line) applied to the system.
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Compensation of creep and hysteresis effects at 1 Hz scanning. Parallel white lines are markers for comparison between plots.
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High speed compensation of plezoactuator dynamics
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Experimental results with 250 Hz scan rate
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Experimental results: scan-path tracking at 30 Hz showing drift due to creep, offset due to hysteresis, and oscillations due to induced vibrations (solid line represents the desired output and the light dotted-line represents tracking without inverse compensation). These effects are removed with inverse compensation (heavy dotted-line).




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