Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

[+] Author and Article Information
D. Croft

Department of Mechanical Engineering, 50 S. Central Campus Dr., MEB 3201, University of Utah, Salt Lake City, UT 84112-9208

G. Shed

Burleigh Instruments Inc., Fishers, NY 14453

S. Devasia

Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600

J. Dyn. Sys., Meas., Control 123(1), 35-43 (Nov 19, 1999) (9 pages) doi:10.1115/1.1341197 History: Received November 19, 1999
Copyright © 2001 by ASME
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Choi,  S., Cho,  S., and Park,  Y., 1999, “Vibration and position tracking control of piezoceramic-based smart structures via qft,” ASME J. Dyn. Syst., Meas., Control, 121, pp. 27–33.
Wiesendanger, R., 1994, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, Cambridge, UK.
Barrett,  R., 1994, “Active plate and missile wing development using directionally attached piezoelectric elements,” AIAA J., 32, No. 3, Mar., pp. 601–609.
Ge,  P., and Jouaneh,  M., 1996, “Tracking control of a piezoceramic actuator,” IEEE Trans. Control Syst. Technol., 4, No. 3, pp. 209–216.
Robinson,  R. S., 1996, “Interactive computer correction of piezoelectric creep in scanning tunneling microscopy images,” J. Comput.-Assist. Microsc., 2, No. 1, pp. 53–58.
Fett,  T., and Thun,  G., 1998, “Determination of room-temperature tensile creep of pzt,” J. Mater. Sci. Lett., 17, No. 22, pp. 1929–1931.
Xie,  W., Dai,  X., Xu,  L. S., Allee,  D. A., and Spector,  J., 1997, “Fabrication of cr nanostructures with scanning tunneling microscope,” Nanotechnology, 8, No. 2, pp. 88–93.
Basedow,  R. W., and Cocks,  T. D., 1980, “Piezoelectric ceramic displacement characteristics at low frequencies and their consequences in fabry-perot interferometry,” J. Phys. E, 13, pp. 840–844.
Goldfarb,  M., and Celanovic,  N., 1997, “A lumped parameter electromechanical model for describing the nonlinear behavior of piezoelectric actuators,” ASME J. Dyn. Syst., Meas., Control, 119, Sept., pp. 478–485.
Kaizuka,  H., 1989, “Application of capacitor insertion method to scanning tunneling microscopes,” Rev. Sci. Instrum., 60, No. 10, pp. 3119–3122.
Barrett,  R. C., and Quate,  C. F., 1991, “Optical scan-correction system applied to atomic force microscopy,” Rev. Sci. Instrum., 62, pp. 1393–1399.
Daniele, A., Salapaka, S., Salapaka, M. V., and Dahleh, M., 1999, “Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, identification and control,” Proceedings of the American Control Conference, San Diego, CA, June, pp. 253–257.
Cruz-Hernandez, J. M., and Hayward, V., 1997, “On the linear compensation of hysteresis,” Proceedings of the 36th Conference on Decision and Control, San Diego, CA, Dec., pp. 1956–1957.
Main,  J. A., and Garcia,  E., 1997, “Piezoelectric stack actuators and control system design: Strategies and pitfalls,” J. Guid. Control Dyn., 20, No. 3, May–June, pp. 479–485.
Zhao,  Y., and Jayasuriya,  S., 1995, “Feedforward controllers and tracking accuracy in the presence of plant uncertainties,” ASME J. Dyn. Syst., Meas., Control, 117, No. 4, pp. 490–495.
Bayo,  E., 1987, “A finite-element approach to control the end-point motion of a single-link flexible robot,” J. Rob. Syst., 4, No. 1, pp. 63–75.
Dewey,  J. S., Leang,  K., and Devasia,  S., 1998, “Experimental and theoretical results in output-trajectory redesign for flexible structures,” ASME J. Dyn. Syst., Meas., Control, 120, No. 4, Dec., pp. 456–461.
Croft,  D., and Devasia,  S., 1999, “Vibration compensation for high speed scanning tunneling microscopy,” Rev. Sci. Instrum., 70, No. 12, Dec., pp. 4600–4605.
Malvern L. E., 1969, Introduction to the Mechanics of a Continuous Medium, chapter 6, Prentice-Hall, Englewood Cliffs, NJ, pp. 313–319.
Chen,  P. J., and Montgomery,  S. T., 1980, “A macroscopic theory for the existence of the hysteresis and butterfly loops in ferroelectricity,” Ferroelectrics, 23, pp. 199–208.
Holman,  A. E., Scholte,  P. M. L. O., Chr. Heerens,  W., and Tunistra,  F., 1995, “Analysis of piezo actuators in translation constructions,” Rev. Sci. Instrum., 66, No. 5, May, pp. 3208–3215.
Coleman,  B. D., and Hodgdon,  M. L., 1986, “A constitutive relation for rate-independent hysteresis in ferromagnetically soft material,” Int. J. Eng. Sci., 24, No. 6, pp. 897–919.
Schafer,  J., and Janocha,  H., 1995, “Compensation of hysteresis in solid-state actuators,” Sens. Actuators A, 49, pp. 97–102.
Mayergoyz, I. D., 1991, Mathematical Models of Hysteresis, Springer-Verlag.
Sasada,  I., Urabe,  H., and Harada,  K., 1988, “Hysteresis error correction of magnetic sensors using preisach model,” IEEE Transl. J. Magn. Jpn., 3, No. 7, pp. 586–587.
Zou,  Q., and Devasia,  S., 1999, “Preview-based stable-inversion for output tracking,” ASME J. Dyn. Syst., Meas., Control, 121, No. 4, Dec., pp. 625–630.
Brinkerhoff,  R., and Devasia,  S., 2000, “Output tracking for actuator deficient/redundant systems: Multiple piezoactuator example,” J. Guid. Control Dyn., 23, No. 2, Mar.-Apr., pp. 370–373.


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x-y-z axes of tube-shaped piezoactuator used in scanning probe microscopy
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Schematics of experimental AFM system
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Inversion-based approach for x-axis scan control
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Viscoelastic creep model
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Bode plots (solid line is measured and dashed line is model)
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Comparison of measured and predicted creep response
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Preisach inverse-hysteresis model
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Experimental verification of inverse-hysteresis model: The predicted input (solid line) from the inverse-hysteresis model is compared with the actual input (dotted line) applied to the system.
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Compensation of creep and hysteresis effects at 1 Hz scanning. Parallel white lines are markers for comparison between plots.
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High speed compensation of plezoactuator dynamics
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Experimental results with 250 Hz scan rate
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Experimental results: scan-path tracking at 30 Hz showing drift due to creep, offset due to hysteresis, and oscillations due to induced vibrations (solid line represents the desired output and the light dotted-line represents tracking without inverse compensation). These effects are removed with inverse compensation (heavy dotted-line).




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