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Research Papers

Static and Vibration Analyses of a Three-Dimensional Snake-Like Micropositioning Stage

[+] Author and Article Information
Nicola Scuor

DMRN—Dipartimento di
Ingegneria Industriale e dell'Informazione,
University of Trieste,
34127 Trieste, Italy
e-mail: nscuor@units.it

Paolo Gallina

Dipartimento di Ingegneria
Meccanica e Navale,
University of Trieste,
34127 Trieste, Italy
e-mail: pgallina@units.it

Marco Giovagnoni

Dipartimento di Ingegneria Elettrica
Gestionale Meccanica,
University of Udine,
33100 Udine, Italy
e-mail: marco.giovagnoni@uniud.it

1Corresponding author.

Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received May 16, 2012; final manuscript received September 30, 2013; published online October 18, 2013. Assoc. Editor: Qingze Zou.

J. Dyn. Sys., Meas., Control 136(1), 011017 (Oct 18, 2013) (9 pages) Paper No: DS-12-1140; doi: 10.1115/1.4025606 History: Received May 16, 2012; Revised September 30, 2013

This paper presets three degrees of freedom (DOF) piezoelectric micropositioning stage. The stage is composed of a stack of piezodisk bender actuators actuated in such a way to prevent the end-effector from rotating; this way the end-effector can only translate along the x, y, and z axes. Thanks to its snake-like configuration, the system is capable of large displacements (of the order of 50 μm) with low driving voltages (of the order of 100 V). Several lumped-mass static and dynamic models of the device have been implemented. Static experimental results, which are in agreement with simulation data, confirmed the performances of the device. A dynamic model showed the natural frequencies of the mechanism. Also dynamic tests have been conducted in order to validate the dynamic model.

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Figures

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Fig. 1

2D and 3D drawings of the micropositioning stage. Top figure: the lateral section; bottom figure: the 3D sectioned representation.

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Fig. 2

Schema of the modified piezoelectric disk and electrical connections

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Fig. 3

Excitation of the piezoelectric disk. (a) No electrical excitation; (b) symmetrical excitation, namely, VA = VC /= 0;VB = VD = 0 or equivalently VA = VC = VB = VD /= 0; and (c) asymmetric excitation, namely, VA = -VC;VB = VD = 0.

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Fig. 4

Micropositioning stage prototype

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Fig. 5

Kinematically equivalent model of the micropositioning stage used for the analysis with parameters and coordinate frame

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Fig. 6

Axial position of the end-effector with different combination of driving voltages: (a) Vm = 0, ΔV = 0; (b) Vm = 0, ΔV ≠ 0; and (c) Vm = Vm_f, ΔV ≠ 0

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Fig. 7

Axial displacement of ΔXe versus ΔV when Vm = 0

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Fig. 8

End-effector lateral displacement (along Y-direction) versus driving voltage ΔV (Vm = 0)

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Fig. 9

End-effector axial displacement (along X-direction) versus driving voltage VmV = 0)

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Fig. 10

Longitudinal dynamic model of the microstage

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Fig. 11

Transfer function's gain of the longitudinal vibrations of the microstage versus frequency

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Fig. 12

Dynamic model employed for the estimation of transversal vibrations

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Fig. 13

Transfer function's gain of the transversal vibrations of the microstage versus frequency

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