Research Papers

Static and Vibration Analyses of a Three-Dimensional Snake-Like Micropositioning Stage

[+] Author and Article Information
Nicola Scuor

DMRN—Dipartimento di
Ingegneria Industriale e dell'Informazione,
University of Trieste,
34127 Trieste, Italy
e-mail: nscuor@units.it

Paolo Gallina

Dipartimento di Ingegneria
Meccanica e Navale,
University of Trieste,
34127 Trieste, Italy
e-mail: pgallina@units.it

Marco Giovagnoni

Dipartimento di Ingegneria Elettrica
Gestionale Meccanica,
University of Udine,
33100 Udine, Italy
e-mail: marco.giovagnoni@uniud.it

1Corresponding author.

Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received May 16, 2012; final manuscript received September 30, 2013; published online October 18, 2013. Assoc. Editor: Qingze Zou.

J. Dyn. Sys., Meas., Control 136(1), 011017 (Oct 18, 2013) (9 pages) Paper No: DS-12-1140; doi: 10.1115/1.4025606 History: Received May 16, 2012; Revised September 30, 2013

This paper presets three degrees of freedom (DOF) piezoelectric micropositioning stage. The stage is composed of a stack of piezodisk bender actuators actuated in such a way to prevent the end-effector from rotating; this way the end-effector can only translate along the x, y, and z axes. Thanks to its snake-like configuration, the system is capable of large displacements (of the order of 50 μm) with low driving voltages (of the order of 100 V). Several lumped-mass static and dynamic models of the device have been implemented. Static experimental results, which are in agreement with simulation data, confirmed the performances of the device. A dynamic model showed the natural frequencies of the mechanism. Also dynamic tests have been conducted in order to validate the dynamic model.

Copyright © 2014 by ASME
Your Session has timed out. Please sign back in to continue.



Grahic Jump Location
Fig. 1

2D and 3D drawings of the micropositioning stage. Top figure: the lateral section; bottom figure: the 3D sectioned representation.

Grahic Jump Location
Fig. 2

Schema of the modified piezoelectric disk and electrical connections

Grahic Jump Location
Fig. 3

Excitation of the piezoelectric disk. (a) No electrical excitation; (b) symmetrical excitation, namely, VA = VC /= 0;VB = VD = 0 or equivalently VA = VC = VB = VD /= 0; and (c) asymmetric excitation, namely, VA = -VC;VB = VD = 0.

Grahic Jump Location
Fig. 4

Micropositioning stage prototype

Grahic Jump Location
Fig. 5

Kinematically equivalent model of the micropositioning stage used for the analysis with parameters and coordinate frame

Grahic Jump Location
Fig. 6

Axial position of the end-effector with different combination of driving voltages: (a) Vm = 0, ΔV = 0; (b) Vm = 0, ΔV ≠ 0; and (c) Vm = Vm_f, ΔV ≠ 0

Grahic Jump Location
Fig. 7

Axial displacement of ΔXe versus ΔV when Vm = 0

Grahic Jump Location
Fig. 8

End-effector lateral displacement (along Y-direction) versus driving voltage ΔV (Vm = 0)

Grahic Jump Location
Fig. 9

End-effector axial displacement (along X-direction) versus driving voltage VmV = 0)

Grahic Jump Location
Fig. 10

Longitudinal dynamic model of the microstage

Grahic Jump Location
Fig. 11

Transfer function's gain of the longitudinal vibrations of the microstage versus frequency

Grahic Jump Location
Fig. 12

Dynamic model employed for the estimation of transversal vibrations

Grahic Jump Location
Fig. 13

Transfer function's gain of the transversal vibrations of the microstage versus frequency




Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In