Research Papers

Identification and Modeling of Contact Dynamics of Precise Direct Drive Stages

[+] Author and Article Information
Michael Feldman

Faculty of Mechanical Engineering,
Haifa 32000, Israel
e-mail: MFeldman@technion.ac.il

Yaron Zimmerman

Spectrum Engineering Ltd.,
Kiryat Tivon 36503, Israel
e-mail: yaron.zimmerman@gmail.com

Michael Gissin

Nanomotion Ltd.,
Mordot HaCarmel Industrial Park,
Yokneam 20692, Israel
e-mail: michael.gissin@nanomotion.com

Izhak Bucher

Faculty of Mechanical Engineering,
Technion Technion,
Haifa 32000, Israel
e-mail: bucher@technion.ac.il

1Corresponding author.

Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received March 3, 2014; final manuscript received February 10, 2016; published online May 3, 2016. Assoc. Editor: Srinivasa M. Salapaka.

J. Dyn. Sys., Meas., Control 138(7), 071001 (May 03, 2016) (10 pages) Paper No: DS-14-1097; doi: 10.1115/1.4033017 History: Received March 03, 2014; Revised February 10, 2016

The aim of this paper is to develop identification that is capable of capturing the characteristics of nonlinear tangential elastic and friction forces arising in submicron motions. Using novel Hilbert transform based signal processing and making use of the intimate relations between internal elastic and friction forces, the latter can be simultaneously recovered from measured data. The experiments were performed on a stage equipped with linear motors, while being driven by slow, quasi-harmonic excitation at frequencies of 1–40 Hz. The identified elastic force incorporates the inevitable nonlinear nature of the stage. The proposed identification technique can be useful for the analysis of modeling contact dynamics between moving and sliding parts in situ. This technique can possibly develop improved closed-loop control algorithms.

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Fig. 1

Acting forces of the moving object

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Fig. 2

Block diagram of the internal resistance force identification

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Fig. 3

The experimental slow quasi-static regime of upper table axis under harmonic force with 4 Hz frequency and 3.5 N amplitude excitation

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Fig. 4

The components of the total internal resistance and the separated stiffness and friction forces per unit mass of the slow quasi-static regime with 2 Hz constant frequency excitation and slow varying amplitude

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Fig. 5

The identified stiffness force function per unit mass (a) and the system skeleton curve and (b) of the lower stage axis

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Fig. 6

The identified friction force function per unit mass (a) and the damping curve and (b) of the lower axis

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Fig. 7

The slow regime with 2 Hz constant frequency excitation and the linear increasing-decreasing amplitude from 0 to 35 N: The time-varying input force and the position signal (a); the phase shift between the force and the position signals (b); and the relationship between the input force and the out position amplitude (c)

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Fig. 8

The identified stiffness force (a) and (c) and the friction force (b) and (d) for the slow regime with 2 Hz constant frequency excitation and the higher linear varying amplitude

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Fig. 9

The approximate boundary line between the micro- and macro-motion of the upper axis stage

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Fig. 10

The simulation of slow regime of vibration system (m = 10 kg, k = 1 × 4 N/m) with the Dahl block (σ = 0.15 N · s/m, Fc = 1/6 × 105N) under harmonic force with 0.16 Hz frequency and 0.3 N amplitude excitation

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Fig. 11

First four velocity components decomposed by the HVD of the slow regime of vibration system (m = 10 kg, k = 1 × 104 N/m) with the Dahl block (σ = 0.15 N · s/m, Fc = 1/6 × 105 N) under harmonic force with 2.5 Hz frequency and 0.3 N amplitude excitation



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