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Technical Brief

The fundamental bandwidth limit of piezoelectrically actuated nanopositioners with motion amplification

[+] Author and Article Information
Jayanth Gobbalipur Ranganath

Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India
jayanth@isu.iisc.ernet.in

1Corresponding author.

ASME doi:10.1115/1.4036550 History: Received September 28, 2016; Revised March 16, 2017

Abstract

This paper proposes a simple reduced-order model for a general flexure-guided piezoelectrically actuated nanopositioner and employs it to derive the upper limit of achievable bandwidth for a specified travel range. It is shown that flexure-based motion amplification enables achieving higher bandwidth than that obtained when they are used for guiding motion alone. The optimal amplification and the corresponding maximum bandwidth are studied as function of the mass carried by the positioner and the stiffness of the flexure. Simple analytical expressions are derived for the two in case of stiff flexures carrying small mass. The proposed reduced-order model is validated by means of finite element analysis.

Copyright (c) 2017 by ASME
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