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Research Papers

Robust Voltage Control for an Electrostatic Micro-Actuator

[+] Author and Article Information
Prasanth Kandula

Mem. ASME
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: p.kandula@vikes.csuohio.edu

Lili Dong

Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: L.Dong34@csuohio.edu

1Corresponding author.

Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received May 5, 2017; final manuscript received November 14, 2017; published online December 22, 2017. Assoc. Editor: Dumitru I. Caruntu.

J. Dyn. Sys., Meas., Control 140(6), 061012 (Dec 22, 2017) (7 pages) Paper No: DS-17-1238; doi: 10.1115/1.4038493 History: Received May 05, 2017; Revised November 14, 2017

When a parallel-plate electrostatic actuator (ESA) is driven by a voltage source, pull-in instability limits the range of displacement to one-third of the gap between plates. In this paper, a nonlinear active disturbance rejection controller (NADRC) is originally developed on the ESA. Our control objectives are stabilizing and increasing the displacement of an ESA to 99.99% of its full gap. Most of the reported controllers in literature are based on linearized models of the ESAs and depend on detailed model information of them. However, the ESA is inherently nonlinear and has model uncertainties due to the imperfections of microfabrication and packaging. The NADRC consists of a nonlinear extended state observer (NESO) and a feedback controller. The NESO is used to estimate system states and unknown nonlinear dynamics for the ESA. Therefore, it does not require accurate model. We simulate the NADRC on a nonlinear ESA in the presences of external disturbance, system uncertainties, and noise. The simulation results verify the effectiveness of the controller by successfully extending the travel range of ESA beyond pull-in point. They also demonstrate that the controller is robust against both disturbance and parameter variations, and has low sensitivity to measurement noise. Furthermore, the stability for the control system with NADRC is theoretically proved.

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Figures

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Fig. 2

Block diagram of NADRC with ESA

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Fig. 1

Electromechanical model of ESA [9]

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Fig. 6

Scaled control signals with parameter variations

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Fig. 8

Scaled displacement output of ESA with measurement noise

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Fig. 9

Scaled control signal with measurement noise

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Fig. 3

Step responses of ESA: (a) scaled displacement output, (b) normalized velocity, and (c) normalized charge

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Fig. 4

Scaled control signal for ESA

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Fig. 5

Scaled displacement outputs of ESA with parameter variations

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Fig. 10

Scaled displacement output of ESA with unit step disturbance

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Fig. 11

Scaled displacement output of ESA with large step disturbance

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Fig. 12

Scaled control signals in the presence of step disturbances

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