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research-article

Robust Voltage Control for an Electrostatic Micro-actuator

[+] Author and Article Information
Prasanth Kandula

ASME Student Member, Department of Electrical Engineering and Computer Science, Cleveland State University, 2121 Euclid Ave., Cleveland, OH 44115
p.kandula@vikes.csuohio.edu

Lili Dong

Associate Professor, Department of Electrical Engineering and Computer Science, Cleveland State University, 2121 Euclid Ave., Cleveland, OH 44115
l.dong34@csuohio.edu

1Corresponding author.

ASME doi:10.1115/1.4038493 History: Received May 05, 2017; Revised November 14, 2017

Abstract

When a parallel-plate electrostatic actuator (ESA) is driven by a voltage source, a pull-in instability limits the range of displacement to one-third of the gap between plates. In this paper, a nonlinear active disturbance rejection controller (NADRC) is originally developed on ESA. Our control objectives are stabilizing and increasing the displacement of an ESA to 99.99% of its full gap. Most of the reported controllers in literature are based on linearized models of the ESAs, and depend on detailed model information of them. However, the ESA is inherently nonlinear, and has model uncertainties due to the imperfections of micro-fabrication and packaging. The NADRC consists of a nonlinear extended state observer (NESO) and a feedback controller. The NESO is used to estimate system states and unknown nonlinear dynamics for the ESA. Therefore, it doesn't require accurate model. We simulate the NADRC on a nonlinear ESA in the presences of external disturbance, system uncertainties and noise. The simulation results verify the effectiveness of the controller by successfully extending the travel range of ESA beyond pull-in point. They also demonstrate that the controller is robust against both disturbance and parameter variations, and has low sensitivity to measurement noise. Furthermore, the stability for the NADRC with NESO is theoretically proved.

Copyright (c) 2017 by ASME
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