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Research Papers

Compensation for the Residual Error of the Voltage Drive of the Charge Control of a Piezoelectric Actuator

[+] Author and Article Information
Shih-Tang Liu

Department of Mechanical Engineering,
National Taiwan University,
Taipei 10617, Taiwan, China
e-mail: rone4116115967@gmail.com

Jia-Yush Yen

Professor
Fellow ASME
Department of Mechanical Engineering,
National Taiwan University,
Taipei 10617, Taiwan, China
e-mail: jyen@ntu.edu.tw

Fu-Cheng Wang

Professor
Mem. ASME
Department of Mechanical Engineering,
National Taiwan University,
Taipei 10617, Taiwan, China
e-mail: fcw@ntu.edu.tw

1Corresponding author.

Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received March 13, 2017; final manuscript received September 21, 2017; published online February 13, 2018. Assoc. Editor: Dumitru I. Caruntu.

J. Dyn. Sys., Meas., Control 140(7), 071010 (Feb 13, 2018) (9 pages) Paper No: DS-17-1151; doi: 10.1115/1.4038636 History: Received March 13, 2017; Revised September 21, 2017

One very effective approach to suppress hysteresis from the piezoelectric actuator is to use the charge control across the associated capacitance. The charge driver often uses an additional capacitor connected to the piezo-actuator in series for the charge sense feedback control. When this charge sense is used with a voltage drive for the charge control, the applied voltage will include two parts. The one is the voltage drop across the useful electro-mechanical part and effectively converted to the driving force, whereas the other part indicates the equivalent voltage drop due to the hysteresis. In our research, we noticed that it is possible to use a simple estimator as the hysteresis voltage observer and use it to precompensate for the voltage drop. Comparing to the conventional hysteresis suppression achieved by the closed-loop positional control, we show significant improvement of the control performance. For dynamic applications, we also proposed a combination of the Preisach model with the hysteresis estimator to better suppress the nonlinear behavior. A series of experiments were conducted to demonstrate the performance improvement of the proposed compensator. A 10 nm and 25 nm maximum tracking error can be maintained while tracking a staircase reference and a 30 Hz sinusoidal signal, respectively.

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Figures

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Fig. 2

Hysteresis decoupled piezoelectric actuator model

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Fig. 1

Modified electromechanical piezoelectric actuator model

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Fig. 7

The piezo-actuated stage

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Fig. 3

Gv structure in which up + Ve is equal to uremain

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Fig. 4

(a) The overall control structure and (b) the closed-loop control with successful hysteresis compensation

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Fig. 5

The detailed compensation structure of hybrid compensation method

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Fig. 6

Overall control structure

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Fig. 8

Low-speed recursive curve for Preisach model identification

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Fig. 9

Relationship between the observed uh and u

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Fig. 16

Closed-loop frequency response w/o the compensation

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Fig. 10

Resulting r and uremain without hysteresis compensation, the hysteresis is 27.35%

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Fig. 11

The resulting r and uremain with hysteresis compensation, there is 1.55% of hysteresis

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Fig. 12

Stair signal tracking control results (a) without and (b) with compensation (nm)

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Fig. 13

Comparison of control errors (a) without and (b) with hysteresis compensation) (nm)

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Fig. 14

Tracking 30 Hz sinusoidal signal (a) without and (b) with compensation (nm)

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Fig. 15

Tracking 60 Hz sinusoidal signal (a) without and (b) with compensation (nm)

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